Optical Semiconductor Inspection

What Does High Speed Inspection Look Like?

Optical semiconductor inspection presents complex challenges, including the diminutive size of the target and proximity of individual dies in the wafer space. Quality of wafer inspection is critical due to the risks involved if requirements are not met.

Vision systems with exceptionally high speed and resolution capabilities can play an important role in semiconductor inspection.

This paper addresses the challenges that can arise during the semiconductor inspection process, including reticle inspection in patterned and un-patterned wafers, the identification and flagging of deformed wires, and the presence and absence of features. It also explores the benefits of the Phantom S640 in maintaining uncompromised resolution and speed in optical machine vision inspection.

Read the full Case Study here